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SFM Medical Digital Flow Meters

Sensirion SFM Medical Digital Flow Meters are designed to measure the flow rate of air, oxygen, and other non-aggressive gases with excellent accuracy. These flow meters offer a low-pressure drop with a small dead space. Sensirion SFM Medical Digital Flow Meters deliver ultra-fast update times with high sensitivity. These flow meters offer a bidirectional flow range of -100 standard liters per minute (SLM) to ±250SLM. They feature medical cones for pneumatic connection to standard breathing circuits and a mechanical interface for easy and reliable electrical reconnections. These meters are based on CMOSens® technology, which combines a thermal sensor element, signal processing, and digital calibration on a single microchip for fast signal processing. SFM meters are specifically designed for medical applications such as respiratory, ventilation, anesthesia, and metabolic instruments.

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Image	Part #	Mfr.	Description	Datasheet	Availability	Pricing (USD) Filter the results in the table by unit price based on your quantity.	Qty.	Type	Sensor Type	For Use With	Range	Accuracy	Output Voltage	Operation Mode	Operating Supply Voltage	Port Size	Housing Material
Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 2 slm - 0.002 slm. SFM5500-2slm Sensirion 1: $1,062.04 2In Stock	Mfr. Part No. SFM5500-2slm Mouser Part No 403-SFM5500-2SLM	Sensirion	Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 2 slm - 0.002 slm. Learn More about Sensirion sfm5x mass flow meters	Datasheet	2In Stock	$1,062.04 $1,019.76	Min.: 1 Mult.: 1	Mass Flow Meter	Flow Meter	Gases	2 slm	0.8 %		Bidirectional	15 V to 26.4 V		Aluminum
Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Legris SFM4100-O2 Legris Sensirion 1: $199.95 15In Stock	Mfr. Part No. SFM4100-O2 Legris Mouser Part No 403-SFM4100-O2LEGRIS	Sensirion	Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Legris Learn More about Sensirion sfm4100 flow meters	Datasheet	15In Stock	$199.95 $192.01 $182.61 $167.95 $165.75	Min.: 1 Mult.: 1	Gas Flow Meter		Oxygen	20 L/min	3 %		Bidirectional	3.5 V to 9 V		Stainless Steel
Flow Sensors SFM6000D-5SLM Sensirion 1: $228.68 43In Stock 41Expected 2026/10/28	Mfr. Part No. SFM6000D-5SLM Mouser Part No 403-SFM6000D-5SLM	Sensirion	Flow Sensors Learn More about Sensirion sfm6000d meters	Datasheet	43In Stock 41Expected 2026/10/28	$228.68 $214.05 $208.60 $197.70 $197.61	Min.: 1 Mult.: 1	Mass Flow Meter	Gas	Air, AR, CO2, N2, N2O, O2	2 slm to 50 slm	2 %			24 V	6 mm	Stainless Steel
Flow Sensors SFM6000D-50SLM Sensirion 1: $242.39 11In Stock	Mfr. Part No. SFM6000D-50SLM Mouser Part No 403-SFM6000D-50SLM	Sensirion	Flow Sensors Learn More about Sensirion sfm6000d meters	Datasheet	11In Stock	$242.39 $226.89 $225.55 $206.29 View $202.70 Quote	Min.: 1 Mult.: 1	Mass Flow Meter	Gas	Air, AR, CO2, N2, N2O, O2	2 slm to 50 slm	2 %			24 V	6 mm	Stainless Steel
Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Disposable Single Use Version SFM3300-D Sensirion 1: $42.54 1,556In Stock	Mfr. Part No. SFM3300-D Mouser Part No 403-SFM3300-D	Sensirion	Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Disposable Single Use Version Learn More about Sensirion sfm digital flow meters	Datasheet	1,556In Stock	$42.54 $39.13 $37.87 $36.06 View $34.33 $33.04 Quote	Min.: 1 Mult.: 1	Air Flow Sensor		Air, Oxygen, Non-Aggressive Gases	+/- 250 slm	7 %		Bidirectional	5 V		Plastic
Flow Sensors SFM6000D-20SLM Sensirion 1: $217.80 5On Order	Mfr. Part No. SFM6000D-20SLM Mouser Part No 403-SFM6000D-20SLM	Sensirion	Flow Sensors Learn More about Sensirion sfm6000d meters	Datasheet	5On Order On Order Ship Dates Mfr. No: SFM6000D-20SLM Stock: 0 On Order: 2 Expected 2026/11/18 3 Expected 2026/11/25 Factory Lead Time: 11 Weeks	$217.80 $203.86 $198.66 $192.45 $191.56	Min.: 1 Mult.: 1	Mass Flow Meter	Gas	Air, AR, CO2, N2, N2O, O2	2 slm to 50 slm	2 %			24 V	6 mm	Stainless Steel
Flow Sensors Digital (Mass) Flow Meter with range of -30slm to +300slm SFM3003-300-CL Sensirion 1: $126.23 35In Stock	Mfr. Part No. SFM3003-300-CL Mouser Part No 403-SFM3003-300-CL	Sensirion	Flow Sensors Digital (Mass) Flow Meter with range of -30slm to +300slm Learn More about Sensirion sfm3003 flow meters	Datasheet	35In Stock	$126.23 $117.47 $116.90 $110.62 View $106.34 $104.97 Quote	Min.: 1 Mult.: 1	Digital Mass Flow Meter	Flow Meter	Air, Oxygen	- 30 slm to 300 slm	2.5 %		Bidirectional	3.3 V	19.8 mm	Polyphenylene Ether (PPE)
Flow Sensors Digital Airflow sensor SFM3200-250 Sensirion 1: $164.16 11In Stock	Mfr. Part No. SFM3200-250 Mouser Part No 403-SFM3200-250	Sensirion	Flow Sensors Digital Airflow sensor Learn More about Sensirion sfm3200 digital flow meter	Datasheet	11In Stock	$164.16 $153.17 $149.06 $139.78 View $136.95 Quote	Min.: 1 Mult.: 1	Air Flow Sensor	Digital Flow Meter	Air, Oxygen, Non-Aggressive Gases	- 100 slm to 250 slm	7 %		Bidirectional	5 V	26 mm	Plastic
Flow Sensors -100 slm to +250 slm (bi-directional)Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version SFM3200-AW Sensirion 1: $268.36 14In Stock	Mfr. Part No. SFM3200-AW Mouser Part No 403-SFM3200-AW	Sensirion	Flow Sensors -100 slm to +250 slm (bi-directional)Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version Learn More about Sensirion sfm3200 digital flow meter	Datasheet	14In Stock	$268.36 $237.94 $212.32 $195.29 View $192.80 Quote	Min.: 1 Mult.: 1	Air Flow Sensor		Air, Oxygen, Non-Aggressive Gases	- 100 slm to 250 slm	7 %		Bidirectional	5 V		Plastic
Flow Sensors Sensor device SFM4100-Air-N2-Legris Sensirion 1: $199.95 38In Stock	Mfr. Part No. SFM4100-Air-N2-Legris Mouser Part No 403-SFM4100AIR	Sensirion	Flow Sensors Sensor device Learn More about Sensirion sfm4100 flow meters	Datasheet	38In Stock	$199.95 $186.93 $182.07 $173.36	Min.: 1 Mult.: 1	Mass Flow Meter		Air, Non-Aggressive Gases	20 slm	3 %		Bidirectional	5 V to 9 V	6.25 mm	Polyamide (PA)
Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 10 slm - 0.01 slm. SFM5500-10slm Sensirion 1: $1,093.53 2In Stock 2Expected 2026/10/21	Mfr. Part No. SFM5500-10slm Mouser Part No 403-SFM5500-10SLM	Sensirion	Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 10 slm - 0.01 slm. Learn More about Sensirion sfm5x mass flow meters	Datasheet	2In Stock 2Expected 2026/10/21	$1,093.53 $1,027.31	Min.: 1 Mult.: 1	Mass Flow Meter	Flow Meter	Gases	10 slm	0.8 %		Bidirectional	15 V to 26.4 V		Aluminum
Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 50 sccm - 0.05 sccm. SFM5500-50sccm Sensirion 1: $1,093.53 3In Stock	Mfr. Part No. SFM5500-50sccm Mouser Part No 403-SFM5500-50SCCM	Sensirion	Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 50 sccm - 0.05 sccm. Learn More about Sensirion sfm5x mass flow meters	Datasheet	3In Stock	$1,093.53 $1,027.31	Min.: 1 Mult.: 1	Mass Flow Meter	Flow Meter	Gases	50 slm	0.8 %		Bidirectional	15 V to 26.4 V		Aluminum
Flow Sensors Robust Digital (Mass) Flow Meter with range of -30slm to +300slm SFM3013-300-CL Sensirion 1: $144.35 25In Stock	Mfr. Part No. SFM3013-300-CL Mouser Part No 403-SFM3013-300-CL	Sensirion	Flow Sensors Robust Digital (Mass) Flow Meter with range of -30slm to +300slm Learn More about Sensirion sfm3013 flow meters	Datasheet	25In Stock	$144.35 $134.51 $127.49 $121.45 View $118.73 $117.21 Quote	Min.: 1 Mult.: 1	Digital Mass Flow Meter	Flow Meter	Air, Oxygen	- 30 slm to 300 slm	3.5 %		Bidirectional	3.3 V	19.8 mm	Polyphenylene Ether (PPE)
Flow Sensors Digital Airflow sensor SFM3019 Sensirion 1: $166.29 14In Stock 20Expected 2026/12/16	Mfr. Part No. SFM3019 Mouser Part No 403-SFM3019	Sensirion	Flow Sensors Digital Airflow sensor Learn More about Sensirion sfm3019 digital mass flow meters	Datasheet	14In Stock 20Expected 2026/12/16	$166.29 $155.09 $147.07 $138.91 View $135.42 $134.62 Quote	Min.: 1 Mult.: 1	Digital Flow Meter	Digital Mass Flow Meter	Air, Oxygen	-10 slm to 240 slm	3 %		Unidirectional	2.7 V to 5.5 V		Polyphenylene Ether (PPE)
Flow Sensors Digital (Mass) Flow Meter with range of -10slm to +240slm SFM3119-240-CL Sensirion 1: $124.71 116In Stock	Mfr. Part No. SFM3119-240-CL Mouser Part No 403-SFM3119-240-CL	Sensirion	Flow Sensors Digital (Mass) Flow Meter with range of -10slm to +240slm Learn More about Sensirion sfm3119 flow meter	Datasheet	116In Stock	$124.71 $116.04 $112.81 $108.22 $104.45	Min.: 1 Mult.: 1	Low Pressure Drop Digital Flow Meter	Digital Flow Meter	Air, Oxygen, Non-Aggressive Gases	- 10 slm to 240 slm	2.5 %		Bidirectional	3.3 V	19 mm	Polyphenylene Ether (PPE)
Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version SFM3300-AW Sensirion 1: $224.32 38In Stock	Mfr. Part No. SFM3300-AW Mouser Part No 403-SFM3300-AW	Sensirion	Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version Learn More about Sensirion sfm digital flow meters	Datasheet	38In Stock	$224.32 $209.94 $204.57 $196.97 $193.10	Min.: 1 Mult.: 1	Air Flow Sensor		Air, Oxygen, Non-Aggressive Gases	+/- 250 slm	7 %		Bidirectional	5 V		Plastic
Flow Sensors Singe use Airflow sensor SFM3400-33-D Sensirion 1: $42.90 217In Stock 270Expected 2026/11/25	Mfr. Part No. SFM3400-33-D Mouser Part No 403-SFM3400-33-D	Sensirion	Flow Sensors Singe use Airflow sensor Learn More about Sensirion sfm3400 d flow meter	Datasheet	217In Stock 270Expected 2026/11/25	$42.90 $39.47 $38.19 $36.67 View $34.81 $34.59 $33.90 Quote	Min.: 1 Mult.: 1	Flow Meter	Digital Flow Meter	Air, Oxygen, Non-Aggressive Gases	- 33 slm to 33 slm	10 %		Bidirectional	5 V	15.6 mm, 17.8 mm	Silicon
Flow Sensors 33slm (bidirectional) Digital Flow Meter for Neonatal/Pediatric Medical Applications - Autoclavable & cleanable Version SFM3400-AW Sensirion 1: $223.63 11In Stock 90On Order	Mfr. Part No. SFM3400-AW Mouser Part No 403-SFM3400-AW	Sensirion	Flow Sensors 33slm (bidirectional) Digital Flow Meter for Neonatal/Pediatric Medical Applications - Autoclavable & cleanable Version Learn More about Sensirion sfm3400 d flow meter	Datasheet	11In Stock 90On Order On Order Ship Dates Mfr. No: SFM3400-AW Stock: 11 Can Dispatch Immediately On Order: 60 Expected 2026/11/04 30 Expected 2026/12/02 Factory Lead Time: 18 Weeks	$223.63 $209.29 $203.94 $196.36 View $194.06 Quote	Min.: 1 Mult.: 1	Air Flow Sensor		Air, Oxygen, Non-Aggressive Gases	+/- 33 slm	3 %		Bidirectional	5 V		Plastic
Flow Sensors Digital (Mass) Flow Meter with range of -150slm to +300slm SFM3003-300-CE Sensirion 1: $133.43 9In Stock 40Expected 2026/11/25	Mfr. Part No. SFM3003-300-CE Mouser Part No 403-SFM3003-300-CE	Sensirion	Flow Sensors Digital (Mass) Flow Meter with range of -150slm to +300slm Learn More about Sensirion sfm3003 flow meters	Datasheet	9In Stock 40Expected 2026/11/25	$133.43 $124.17 $117.54 $109.90 View $107.12 $106.05	Min.: 1 Mult.: 1	Digital Mass Flow Meter	Flow Meter	Air, Oxygen	-150 slm to 300 slm	2.5 %		Bidirectional	3.3 V	19.8 mm	Polyphenylene Ether (PPE)
Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 0.5 slm - 0.0005 slm. SFM5500-0.5slm Sensirion 1: $1,093.53 3Expected 2026/10/07	Mfr. Part No. SFM5500-0.5slm Mouser Part No 403-SFM5500-0.5SLM	Sensirion	Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 0.5 slm - 0.0005 slm. Learn More about Sensirion sfm5x mass flow meters	Datasheet	3Expected 2026/10/07	$1,093.53 $1,038.04	Min.: 1 Mult.: 1	Mass Flow Meter	Flow Meter	Gases	0.5 slm	0.8 %		Bidirectional	15 V to 26.4 V		Aluminum
Flow Sensors Digital Mass Flow Meter -30slm to +300slm, robust with Heliox calibration SFM3013-300-CLM Sensirion 20: $171.96 Non-Stocked Lead-Time 12 Weeks	Mfr. Part No. SFM3013-300-CLM Mouser Part No 403-SFM3013-300-CLM	Sensirion	Flow Sensors Digital Mass Flow Meter -30slm to +300slm, robust with Heliox calibration Learn More about Sensirion sfm3013 flow meters	Datasheet	Non-Stocked Lead-Time 12 Weeks	$171.96 $169.77 View Quote	Min.: 20 Mult.: 20	Digital Mass Flow Meter	Flow Meter	Air, Oxygen	- 30 slm to 300 slm	3.5 %		Bidirectional	3.3 V	19.8 mm	Polyphenylene Ether (PPE)
Flow Sensors Mass Flow Meter Sensor for Respiratory Applications SFM3100-240-VC Sensirion 30: $161.51 Non-Stocked Lead-Time 12 Weeks	Mfr. Part No. SFM3100-240-VC Mouser Part No 403-SFM3100-240-VC	Sensirion	Flow Sensors Mass Flow Meter Sensor for Respiratory Applications Learn More about Sensirion sfm digital flow meters	Datasheet	Non-Stocked Lead-Time 12 Weeks	$161.51 $160.16	Min.: 30 Mult.: 30	Mass Air Flow Sensor		Air, Oxygen, Non-Aggressive Gases	- 24 slm to 240 slm	2.5 %	2.4 V	Bidirectional	5 V	14 mm
Flow Sensors Digital Mass Flow Meter for Air, N2 0-20 slm, Downmount SFM4100-Air, N2 Downmount Sensirion 40: $169.36 Non-Stocked Lead-Time 12 Weeks	Mfr. Part No. SFM4100-Air, N2 Downmount Mouser Part No 403-SFM4100-AIRN2DM	Sensirion	Flow Sensors Digital Mass Flow Meter for Air, N2 0-20 slm, Downmount Learn More about Sensirion sfm4100 flow meters	Datasheet	Non-Stocked Lead-Time 12 Weeks	$169.36 View Quote	Min.: 40 Mult.: 40	Gas Flow Meter		Air, Non-Aggressive Gases	20 L/min	3 %		Bidirectional	3.5 V to 9 V		Stainless Steel
Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Downmount SFM4100-AR Downmount Sensirion 40: $178.97 Non-Stocked Lead-Time 12 Weeks	Mfr. Part No. SFM4100-AR Downmount Mouser Part No 403-SFM4100-ARDM	Sensirion	Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Downmount Learn More about Sensirion sfm4100 flow meters	Datasheet	Non-Stocked Lead-Time 12 Weeks	$178.97 View Quote	Min.: 40 Mult.: 40
Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Legris SFM4100-AR Legris Sensirion 40: $179.90 Non-Stocked Lead-Time 12 Weeks	Mfr. Part No. SFM4100-AR Legris Mouser Part No 403-SFM4100-ARLEGRIS	Sensirion	Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Legris Learn More about Sensirion sfm4100 flow meters	Datasheet	Non-Stocked Lead-Time 12 Weeks	$179.90 View Quote	Min.: 40 Mult.: 40

SFM Medical Digital Flow Meters

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