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SFM4100 Digital Mass Flow Meters

Sensirion SFM4100 Digital Mass Flow Meters are designed to accurately measure air and non-aggressive gases over a large dynamic range. These meters can measure mass flow ranges up to 20 standard liters per minute (SLM) and can be easily embedded into a microprocessor environment through the digital I²C interface. These meters have a supply voltage range of 5V_DC to 9V_DC. The SFM4100 sensors are based on patented CMOSens® sensor technology that combines the sensor element, signal processing, and digital calibration on a single microchip. The mass flow is measured by a thermal method on the MEMS sensor element with extended dynamic range, higher long-term stability, and improved repeatability. Sensirion SFM4100 Digital Mass Flow Meters are ideal for demanding and cost-sensitive OEM applications.

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Part #

Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Legris

SFM4100-O2 Legris
Sensirion
1: $199.95
15In Stock

Mfr. Part No.
SFM4100-O2 Legris

Mouser Part No
403-SFM4100-O2LEGRIS

Sensirion

Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Legris

Datasheet

15In Stock

$199.95

$190.41

$182.13

$167.94

$165.75

Min.: 1
Mult.: 1

Gas Flow Meter

Oxygen

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel

Flow Sensors Sensor device

SFM4100-Air-N2-Legris
Sensirion
1: $199.95
39In Stock

Mfr. Part No.
SFM4100-Air-N2-Legris

Mouser Part No
403-SFM4100AIR

Sensirion

Flow Sensors Sensor device

Datasheet

39In Stock

$199.95

$186.93

$182.07

$173.52

$173.51

Min.: 1
Mult.: 1

Mass Flow Meter

Air, Non-Aggressive Gases

20 slm

3 %

Bidirectional

5 V to 9 V

6.25 mm

Polyamide (PA)

Flow Sensors Digital Mass Flow Meter for CO2, 0-20 slm, Legris

SFM4100-CO2 Legris
Sensirion
1: $199.95
23In Stock

Mfr. Part No.
SFM4100-CO2 Legris

Mouser Part No
403-SFM4100CO2LEGRIS

Sensirion

Flow Sensors Digital Mass Flow Meter for CO2, 0-20 slm, Legris

Datasheet

23In Stock

$199.95

$186.93

$182.07

$173.52

$173.51

Min.: 1
Mult.: 1

Gas Flow Meter

Carbon Dioxide

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel

Flow Sensors Digital Mass Flow Meter for Air, N2 0-20 slm, Downmount

SFM4100-Air, N2 Downmount
Sensirion
40: $169.19
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-Air, N2 Downmount

Mouser Part No
403-SFM4100-AIRN2DM

Sensirion

Flow Sensors Digital Mass Flow Meter for Air, N2 0-20 slm, Downmount

Datasheet

Non-Stocked Lead-Time 12 Weeks

$169.19

View

Min.: 40
Mult.: 40

Gas Flow Meter

Air, Non-Aggressive Gases

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel

Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Downmount

SFM4100-AR Downmount
Sensirion
40: $165.75
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-AR Downmount

Mouser Part No
403-SFM4100-ARDM

Sensirion

Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Downmount

Datasheet

Non-Stocked Lead-Time 12 Weeks

$165.75

Min.: 40
Mult.: 40

Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Legris

SFM4100-AR Legris
Sensirion
40: $165.75
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-AR Legris

Mouser Part No
403-SFM4100-ARLEGRIS

Sensirion

Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Legris

Datasheet

Non-Stocked Lead-Time 12 Weeks

$165.75

Min.: 40
Mult.: 40

Flow Sensors Digital Mass Flow Meter for CO2, 0-20 slm, Downmount

SFM4100-CO2 Downmount
Sensirion
40: $165.75
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-CO2 Downmount

Mouser Part No
403-SFM4100-CO2DM

Sensirion

Flow Sensors Digital Mass Flow Meter for CO2, 0-20 slm, Downmount

Datasheet

Non-Stocked Lead-Time 12 Weeks

$165.75

Min.: 40
Mult.: 40

Gas Flow Meter

Carbon Dioxide

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel

Flow Sensors Digital Mass Flow Meter for N2O, 0-20 slm, Downmount

SFM4100-N2O Downmount
Sensirion
40: $173.51
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-N2O Downmount

Mouser Part No
403-SFM4100-N2ODM

Sensirion

Flow Sensors Digital Mass Flow Meter for N2O, 0-20 slm, Downmount

Datasheet

Non-Stocked Lead-Time 12 Weeks

$173.51

Min.: 40
Mult.: 40

Gas Flow Meter

Nitrogen Oxide

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel

Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Downmount

SFM4100-O2 Downmount
Sensirion
40: $173.51
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-O2 Downmount

Mouser Part No
403-SFM4100-O2DM

Sensirion

Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Downmount

Datasheet

Non-Stocked Lead-Time 12 Weeks

$173.51

Min.: 40
Mult.: 40

Gas Flow Meter

Oxygen

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel

Flow Sensors Digital Mass Flow Meter for N2O, 0-20 slm, Legris

SFM4100-N2O Legris
Sensirion
40: $170.94
Non-Stocked Lead-Time 12 Weeks

Mfr. Part No.
SFM4100-N2O Legris

Mouser Part No
403-SFM4100N2OLEGRIS

Sensirion

Flow Sensors Digital Mass Flow Meter for N2O, 0-20 slm, Legris

Datasheet

Non-Stocked Lead-Time 12 Weeks

$170.94

View

Min.: 40
Mult.: 40

Gas Flow Meter

Nitrogen Oxide

20 L/min

3 %

Bidirectional

3.5 V to 9 V

Stainless Steel