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D6F Series MEMS Flow Sensors

Omron Electronics D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.

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Image	Part #	Mfr.	Description	Datasheet	Availability	Pricing (USD) Filter the results in the table by unit price based on your quantity.	Qty.	Type	For Use With	Range	Accuracy	Output Voltage	Operating Supply Voltage	Port Size	Housing Material
Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term D6F-P0001A1 Omron Electronics 1: $56.09 315In Stock	Mfr. Part No. D6F-P0001A1 Mouser Part No 653-D6F-P0001A1	Omron Electronics	Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	315In Stock	$56.09 $50.25 $50.22 $47.75 View $46.40 $46.24 Quote	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 0.1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec D6F-V03A1 Omron Electronics 1: $23.17 602In Stock	Mfr. Part No. D6F-V03A1 Mouser Part No 653-D6F-V03A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec Learn More about Omron Electronics omron d6f v mems flow sensor	Datasheet	602In Stock	$23.17 $21.99 $20.88 $19.74 View $19.04 $18.60 $17.96 Quote	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 3 m/s	10 %	0 V to 2 V	3.15 V to 9.45 V	2 mm x 3 mm	Thermoplastic (TP)
Flow Sensors MEMS Airflow Sensor Air 0-10 LPM D6F-10A61-000 Omron Electronics 1: $267.34 2In Stock 23Expected 2027/04/20	Mfr. Part No. D6F-10A61-000 Mouser Part No 653-D6F-10A61-000	Omron Electronics	Flow Sensors MEMS Airflow Sensor Air 0-10 LPM Learn More about Omron Electronics omrond6fp	Datasheet	2In Stock 23Expected 2027/04/20	$267.34 $249.78 $237.09 $230.24	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-50A7D-000-0 Omron Electronics 1: $223.91 8In Stock	Mfr. Part No. D6F-50A7D-000-0 Mouser Part No 653-D6F-50A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	8In Stock	$223.91 $197.43 $190.98 $188.57 View Quote	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 50 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter D6F-P0010A1 Omron Electronics 1: $58.35 1,061In Stock 2,375On Order	Mfr. Part No. D6F-P0010A1 Mouser Part No 653-D6F-P0010A1	Omron Electronics	Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	1,061In Stock 2,375On Order On Order Ship Dates Mfr. No: D6F-P0010A1 Stock: 1,061 Can Dispatch Immediately On Order: 1,075 Expected 2026/10/30 1,300 Expected 2027/01/01 Factory Lead Time: 26 Weeks	$58.35 $53.93 $51.87 $49.81 View $49.10 $49.02	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min			4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec D6F-W04A1 Omron Electronics 1: $93.34 278In Stock	Mfr. Part No. D6F-W04A1 Mouser Part No 653-D6F-W04A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	278In Stock	$93.34 $86.61 $84.08 $81.07 $79.79	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 4 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 D6F-CABLE2 Omron Electronics 1: $10.77 311In Stock	Mfr. Part No. D6F-CABLE2 Mouser Part No 653-D6F-CABLE2	Omron Electronics	Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 Learn More about Omron Electronics omrond6fp	Datasheet	311In Stock	$10.77 $9.76 $9.37 $8.92 View $8.61 $8.34 $7.76 $7.54	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Mass Flow Sensor D6F-03A3-000			1 V to 5 V
Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto D6F-P0010A2 Omron Electronics 1: $59.91 224In Stock 325Expected 2026/11/06	Mfr. Part No. D6F-P0010A2 Mouser Part No 653-D6F-P0010A2	Omron Electronics	Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	224In Stock 325Expected 2026/11/06	$59.91 $55.31 $52.89 $49.52 $49.02	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min		0 V to 3.1 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Flow Sensor Manifold Mount D6F-P0010AM2 Omron Electronics 1: $63.33 93In Stock	Mfr. Part No. D6F-P0010AM2 Mouser Part No 653-D6F-P0010AM2	Omron Electronics	Flow Sensors MEMS Flow Sensor Manifold Mount Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	93In Stock	$63.33 $57.18 $54.38 $51.59 View $50.30 $49.33 $49.30 Quote	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec D6F-W01A1 Omron Electronics 1: $93.55 140In Stock	Mfr. Part No. D6F-W01A1 Mouser Part No 653-D6F-W01A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	140In Stock	$93.55 $86.78 $83.38 $81.27 $79.79	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 1 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Velocity Sensor 10m/sec D6F-W10A1 Omron Electronics 1: $93.75 53In Stock	Mfr. Part No. D6F-W10A1 Mouser Part No 653-D6F-W10A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor 10m/sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	53In Stock	$93.75 $86.97 $83.24 $81.42 $79.79	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 10 m/s	5 %	6 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS air 0-10L/min D6F-10A5-000 Omron Electronics 1: $263.11 4In Stock 5Expected 2026/10/30	Mfr. Part No. D6F-10A5-000 Mouser Part No 653-D6F-10A5-000	Omron Electronics	Flow Sensors MEMS air 0-10L/min Learn More about Omron Electronics omrond6fp	Datasheet	4In Stock 5Expected 2026/10/30	$263.11 $246.61 $244.82	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-20A6-000 Omron Electronics 1: $313.99 17Expected 2026/10/30	Mfr. Part No. D6F-20A6-000 Mouser Part No 653-D6F-20A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	17Expected 2026/10/30	$313.99 $246.63 $244.82	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Airflow Sensor Air 0-20 LPM D6F-20A61-000 Omron Electronics 1: $278.90 2In Stock 2Expected 2026/12/22	Mfr. Part No. D6F-20A61-000 Mouser Part No 653-D6F-20A61-000	Omron Electronics	Flow Sensors MEMS Airflow Sensor Air 0-20 LPM Learn More about Omron Electronics omrond6fp	Datasheet	2In Stock 2Expected 2026/12/22	$278.90 $261.42 $253.48 $244.82	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-20A7D-000-0 Omron Electronics 1: $189.81 6In Stock	Mfr. Part No. D6F-20A7D-000-0 Mouser Part No 653-D6F-20A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	6In Stock	$189.81 $184.67 $180.33 $179.16 View Quote	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 20 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors Cable for D6F-P MEMS Flow Sensors D6F-CABLE1 Omron Electronics 1: $10.47 69In Stock 102Expected 2026/11/06	Mfr. Part No. D6F-CABLE1 Mouser Part No 653-D6F-CABLE1	Omron Electronics	Flow Sensors Cable for D6F-P MEMS Flow Sensors Learn More about Omron Electronics omrond6fp	Datasheet	69In Stock 102Expected 2026/11/06	$10.47 $9.76 $9.37 $8.92 View $8.61 $8.26 $8.00 $7.68 $7.54	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Air Flow Sensor D6F-10A, -20A, -50A
Flow Sensors CABLE FOR D6F D6F-CABLE3 Omron Electronics 1: $10.77 39In Stock	Mfr. Part No. D6F-CABLE3 Mouser Part No 653-D6F-CABLE3	Omron Electronics	Flow Sensors CABLE FOR D6F Learn More about Omron Electronics omrond6fp	Datasheet	39In Stock	$10.77 $9.76 $9.37 $8.82 View $8.61 $7.83 $7.71 $7.37	Min.: 1 Mult.: 1	Accessory, Cable	MEMS Flow Sensor
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-10A6-000 Omron Electronics 1: $279.15 43Expected 2026/11/20	Mfr. Part No. D6F-10A6-000 Mouser Part No 653-D6F-10A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	43Expected 2026/11/20	$279.15 $261.66 $250.16 $244.82	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS FLOW SENSOR D6F-10A7D-000-0 Omron Electronics 1: $223.91 10On Order	Mfr. Part No. D6F-10A7D-000-0 Mouser Part No 653-D6F-10A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	10On Order	$223.91 $205.79	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 10 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-50A6-000 Omron Electronics 1: $278.89 8Expected 2026/11/27	Mfr. Part No. D6F-50A6-000 Mouser Part No 653-D6F-50A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	8Expected 2026/11/27	$278.89 $261.42 $250.06 $244.82	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Micro-Flow Sensor D6F-05N7-000 Omron Electronics 1: $291.11 Non-Stocked Lead-Time 28 Weeks	Mfr. Part No. D6F-05N7-000 Mouser Part No 653-D6F-05N7-000	Omron Electronics	Flow Sensors MEMS Micro-Flow Sensor Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 28 Weeks	$291.11 $260.94	Min.: 1 Mult.: 1	Micro-Flow Sensor	City Gas	0 L/min to 5 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V
Flow Sensors MEMS air 0-50L/min D6F-50A5-000 Omron Electronics 1: $278.90 Non-Stocked Lead-Time 26 Weeks	Mfr. Part No. D6F-50A5-000 Mouser Part No 653-D6F-50A5-000	Omron Electronics	Flow Sensors MEMS air 0-50L/min Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 26 Weeks	$278.90 $261.42 $250.06 $244.82	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors FLOW SENSOR D6F-50A61-000 Omron Electronics 1: $269.21 Non-Stocked Lead-Time 26 Weeks	Mfr. Part No. D6F-50A61-000 Mouser Part No 653-D6F-50A61-000	Omron Electronics	Flow Sensors FLOW SENSOR	Datasheet	Non-Stocked Lead-Time 26 Weeks	$269.21 $255.70	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min
Flow Sensors MEMS FLOW SENSOR D6F-70AB71D-000-0 Omron Electronics 1: $237.35 Non-Stocked Lead-Time 26 Weeks	Mfr. Part No. D6F-70AB71D-000-0 Mouser Part No 653-D6F-70AB71D-0000	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	Non-Stocked Lead-Time 26 Weeks	$237.35 $222.12 $205.79	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 70 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors D6FZ-FGT Mntg Bracket Omron Automation and Safety D6FZ-FC03 D6FZ-FC03 Omron Automation and Safety 1: $57.32 Non-Stocked	Mfr. Part No. D6FZ-FC03 Mouser Part No 653-D6FZ-FC03	Omron Automation and Safety	Flow Sensors D6FZ-FGT Mntg Bracket	Datasheet	Non-Stocked	$57.32 $49.40 $46.68 $43.55 View $41.21 $40.17	Min.: 1 Mult.: 1

D6F Series MEMS Flow Sensors

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